Micro-Electromechanical Systems (MEMS) is the process techniques of microfabrication used to create tiny integrated devices or systems that can be defined as miniaturised mechanical and electro-mechanical elements, typically on a semiconductor chip, sensors, actuators, and process-control units with dimensions from tens of micrometres to a few hundred micrometres. MEMS devices have advantageous, especially the small size, ease integration, lightweight, low power consumption, and high resonance frequency, etc.
Related Definitions in the Project: The Technology Definitions
